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钛升华泵
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| Mounting Flange: | 2 3/4 (DN 35) CFF |
| Filament Material: | 85% Ti, 15% Mo |
| Filament Length: | 117 (4.6) mm (in), coiled |
| Filament Weight: | 3.1-3.5 grams |
| Filament Lifetime: | 20, conditional operation hours |
| Maximum Current: | 50 Amps |
| Filaments per TSP: | 3 |
| Assembled Weight: | 1 (2.2) kg (lbs) |
| PN | Descripton |
| 360547 | ASY,PMP,TSP,1 FIL,2.75CF,W/PRT |
| 360190 | TSP Ambient Shield,6" X 2 3/4" |
| 360044 | TSP Ambient Shield,8" X 2 3/4" |
| 360685 | TSP Cryoshroud, 10" CFF Mount |
| 360051 | TSP Cryoshroud, 8" CFF Mount |
| 360549 | TSP,1 FILAMENT,2.75 CF,MS |
| 360043 | TSP,3 FILAMENT,2 3/4" CF FLG |
| 360819 | TSP,3 FILAMENT,2.75 CF,MS,STD |
| Weight: | 8 (17.5) kg (lbs) |
| Mounting Flange: | 8 (DN 150) CFF |
| Surface Area: | 70,900 (110) sq. mm (sq. in.) |
| Liquid Volume: | 1.15 liters |
| PN | Descripton |
| 360547 | ASY,PMP,TSP,1 FIL,2.75CF,W/PRT |
| 360190 | TSP Ambient Shield,6" X 2 3/4" |
| 360044 | TSP Ambient Shield,8" X 2 3/4" |
| 360685 | TSP Cryoshroud, 10" CFF Mount |
| 360051 | TSP Cryoshroud, 8" CFF Mount |
| 360549 | TSP,1 FILAMENT,2.75 CF,MS |
| 360043 | TSP,3 FILAMENT,2 3/4" CF FLG |
| 360819 | TSP,3 FILAMENT,2.75 CF,MS,STD |
| Weight: | 6 (13) kg (lbs) |
| Mounting Flange: | 8 (DN 150) CFF |
| Surface Area: | 82,700 (128) sq. mm (sq. in.) |
| PN | Descripton |
| 360547 | ASY,PMP,TSP,1 FIL,2.75CF,W/PRT |
| 360190 | TSP Ambient Shield,6" X 2 3/4" |
| 360044 | TSP Ambient Shield,8" X 2 3/4" |
| 360685 | TSP Cryoshroud, 10" CFF Mount |
| 360051 | TSP Cryoshroud, 8" CFF Mount |
| 360549 | TSP,1 FILAMENT,2.75 CF,MS |
| 360043 | TSP,3 FILAMENT,2 3/4" CF FLG |
| 360819 | TSP,3 FILAMENT,2.75 CF,MS,STD |
| Weight: | 16.8 (37) kg (lbs) |
| Dimensions: | 242 x 133 x 437 mm, l x w x d |
| Input Power: | 120 or 220/48-62 volts/Hz |
| Output: | 15 volts |
| Display Type: | 1/4 VGA LCD w/touchscreen |
| Humidity: | 0 to 80% RH, noncondensing |
| Temperature: | 0 to 40 deg C |
| Communications: | RS232, RS422, RS485, Ethernet |
| Conformity to Norms: | EN61000-6-1, EN61000-4-2, EN61000-4-3, EN61000-4-4, EN 61010-1 |
| Modes: | Manual, Programmed, Setpoint |
| Output: | 0-55 current (A) |
| Weight: | 12.2 (27) kg (lbs) |
| Dimensions: | 160 x 120 x 300 mm, l x w x d |
| Input Power: | 120 or 220/50-60 volts/Hz |
| Output: | 12 volts |
| Modes: | Manual, Programmed, Dual |
| Output: | 0-55 current (A) |
| Operating Bake Temp: | 200 Deg C |
| Maximum Bake Temp: | 250 Deg C |
| Bend Radius: | 50 mm |
| Connection Clearance (180): | 140 mm |
| Connection Clearance (90 deg): | 100 mm |
| 381001 | CABLE,TSP,H-C,MS-HC1.5-MS |
| 381010 | CABLE,TSP,H-C,MS-HC10-MS |
| 381015 | CABLE,TSP,H-C,MS-HC15-MS |
| 381003 | CABLE,TSP,H-C,MS-HC3-MS |
| 381006 | CABLE,TSP,H-C,MS-HC6-MS |
| 380085 | Cable,TSP/NEG,Control, 15m |
| 310095 | KIT,CONN,H-C CABLE,MS,CNTRL |
| 310097 | KIT,CONN,H-C CABLE,MS,TSP |
| 310096 | KIT,CONN,H-C CABLE,MS90,CNTRL |
| 310098 | KIT,CONN,H-C CABLE,MS90,TSP |
| PN | Descripton |
| 360028 | TSP Filament Kit (12 filament) |
| 360682 | TSP Filament Kit (3 filaments) |
| 360684 | TSP Filament Kit,Var Style |
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Area (cm2/in.2) |
Temperature (°c) |
H2 | O2 | H2O | |||
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Rate (l/s/cm2) |
Speed (l/s) |
Rate (l/s/cm2) |
Speed (l/s) |
Rate (l/s/cm2) |
Speed (l/s) |
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| LIQUID CRYOSHROUD (8 in.) | 709/110 | 20° C | 2.6 | 1,843 | 8.2 | 5,814 | 7.3 | 5,176 |
| 1578/245* | -195° C | 17 | 12,053 | 11 | 7799 | 14.6 | 23,039 | |
| AMBIENT SPUTTER SHIELD (8 in.) | 827/128 | 20° C | 2.6 | 2,150 | 8.2 | 6,780 | 7.3 | 6,037 |
| AMBIENT SPUTTER SHIELD (6 in.) | 621/96 | 20° C | 2.6 | 1,614 | 8.2 | 5,092 | 7.3 | 4,533 |
