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主要应用：向真空系统进行可控充气。 ♦ 气体和表面分析♦ 质谱系统 ♦ 核物理，加速器 ♦ 阴极溅射 ♦ 真空和激光 ♦ 气体纯化 |
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| Actuator | manual |
manual and thermo-mechanical in conjunction with 595PM-16GC |
| Type | 59524-CE01-AAC. | 59524-CE0X-AAF. |
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Connection flange Input Output |
DN 16 CF-R DN 40 CF-F |
DN 16 CF-R DN 40 CF-F |
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Gas flow controllable Min. mbar l/s Max. mbar l/s |
1×10-10 600 1) |
1×10-10 100 1) 2) |
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Tightness mbar l/s Pressure min/max (absolute) mbar / bar Conductance for molecular flow l/s |
1×10-11 1×10-10 / 30 0.7 |
1×10-11 1×10-10 / 30 0.7 |
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Operating temperature °C Bake out temperature °C Storage °C |
≤ 200 ≤ 350 5 … 45 |
≤ 200 ≤ 350 3) 5 … 45 |
| Valve plate Valve seat Housing | sapphire copper alloy stainless steel | sapphire copper alloy stainless steel |
| Weight kg | 1.4 | 1.4 |
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Thermo-mechanical regulation Connection Voltage VDC Current A Heating resistance Ω |
socket, 2 poles (W.W. Fischer) 0 … 20 ≤ 0.5 ≈ 30 |
| Capillary complete, 1m | 528535 | |
| Flange with tube, DN 16 CF-F | 33024-CESK-0001 | |
| Heating jacket, max. 200 °C, 115/230 VAC | 581961 | |
| Power supply V | 115 / 230 | |
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Frequency Hz Power consumption VA |
50 … 60 20 |
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Regulating characteristics Reset time s Proportional gain |
proportional-integral (PI) 2 … 30 2 … 1000 |
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Internal nominal values Scale divisions External nominal value VDC/100 Ω |
0 … 1000 0 … +10 |
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| Protection class | IP 20 | |
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Standard, 80 °C 3 m Part No. 12 m (max. cable length) Part No. |
595CV-99LC-000. 595CV-99LX-AIT. |
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Extension, 200 °C 2 m Part No. |
595CV-99LB-AAA. |
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