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首页 > 产品中心 > 真空阀门 > 节流控制阀 > 节流控制阀
S615蝶阀

主要应用：适用于SEMI, FPD, PV, SOLAR及工业工艺过程排气端的压力控制及真空隔离。特别适合于CVD等快速反应工艺控制。

节流控制蝶阀

带步进电机
带集成压力控制器
DN Ordering numbers
aluminum, hard anodized stainless steel
mm inch ISO-KF ISO-F ISO-KF ISO-F
40 1 ½ 61532-KH  x   y 　 61532-KE  x   y 　
50 2 61534-KH  x   y 　 61534-KE  x   y 　
63 2 ½ 　 61536-PH   x   y 　 61536-PE   x   y
80 3 　 61538-PH   x   y 　 61538-PE   x   y
100 4 　 61540-PH   x   y 　 61540-PE   x   y
X Y Number of
Controller configurations: Interface: sensors:
G  =  basic version J  = RS485 1
A   =  with SPS H   =  with PFO K  = RS485 2
C   =  with SPS and PFO Y  = Ethernet 1
T   =  basic version with VC master Z  = Ethernet 2
V   =  with SPS and VC master L  = CC-Link 1
U   =  with PFO and VC master N = CC-Link 2
W  =  with SPS, PFO and VC master I   = EtherCAT 1
SPS  =  Sensor Power Supply
(±15 V DC power supply for sensor)
PFO  =  Power Failure Option
(valve closes / opens automatically at power failure)
VC     =  Valve Cluster
(for operating several valves synchronously)		 X  = EtherCAT 2
S  = VC slave (without interface) 　
G = RS232 　
H = RS232 　
C = Logic 　
E  = Logic 　
P  = DeviceNet® 　
Q = DeviceNet® 　
D  =  Profibus  　
F  =  Profibus  　
   

技术参数
Leak rate 1): valve body 　
– Aluminum, hard anodized 1 · 10-5 mbar ls-1
– Stainless steel 1 · 10-9 mbar ls-1
Leak rate 1): valve seat 　
– Aluminum, hard anodized 1 · 10-4 mbar ls-1
– Stainless steel 1 · 10-9 mbar ls-1
Pressure range 1) 　
– Aluminum, hard anodized 1 · 10-6 mbar to 1.2 bar (abs)
– Stainless steel 1 · 10-8 mbar to 1.2 bar (abs)
Cycles until first service 2) 　
– Pressure control 2 million
– Closing / opening 　
- DN 40 –  50 250 000
- DN 63 – 100  100 000
Temperature 2) 　
– Valve body ≤ 120 °C
– Ambient ≤  50 °C
Material 　
– Valve body, plate 　
- aluminum EN AW-6082 (3.2315)
- stainless steel  AISI 316L (1.4404 or 1.4435)
– Shaft  AISI 316L (1.4404 or 1.4435)
– Other parts iglidur®X, AISI 316L (1.4404 or 1.4435)
Seal: plate, feedthrough FKM (Viton®)
Feedthrough rotary feedthrough
Mounting position valve seat towards chamber


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