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S652电动控制摆阀

主要应用:适用于SEMI、FPD工艺的排气端压力控制隔离阀,适用于腐蚀性刻蚀及清洗工艺。

电动节流控制阀

DN Ordering numbers
mm inch aluminum aluminum, hard anodized
 ISO-F JIS  ISO-F JIS
200 8  65246-PA  x   y  65246-JA  x   y  65246-PH  x   y  65246-JH  x   y
250 10  65248-PA  x   y  65248-JA  x   y  65248-PH  x   y  65248-JH  x   y
X Y Number of
Controller configurations: Interface: sensors:
G  =  basic version J  = RS485 1
A   =  with SPS H   =  with PFO K  = RS485 2
C   =  with SPS and PFO Y  = Ethernet 1
T   =  basic version with VC master Z  = Ethernet 2
V   =  with SPS and VC master L  = CC-Link 1
U   =  with PFO and VC master N = CC-Link 2
W  =  with SPS, PFO and VC master I   = EtherCAT 1
SPS  =  Sensor Power Supply
(±15 V DC power supply for sensor)
PFO  =  Power Failure Option
(valve closes / opens automatically at power failure)
VC     =  Valve Cluster
(for operating several valves synchronously)
X  = EtherCAT 2
S  = VC slave (without interface)  
G = RS232  
H = RS232  
C = Logic  
E  = Logic  
P  = DeviceNet®  
Q = DeviceNet®  
D  =  Profibus   
F  =  Profibus 
 
 

技术参数

Leak rate 1): valve body
– Aluminum                                                  1 · 10-9 mbar Is-1
– Aluminum, hard anodized                         1 · 10-5 mbar Is-1
Leak rate 1): valve seat
– Aluminum                                                  1 · 10-9 mbar Is-1
– Aluminum, hard anodized                         1 · 10-4 mbar Is-1
Pressure range 1)
– Aluminum                                                  1 · 10-8 mbar to 1.2 bar (abs)
– Aluminum, hard anodized                         1 · 10-6 mbar to 1.2 bar (abs)
Cycles until first service 2)
– Pressure control                                       2.5 million
– Closing / opening                                      20 000
Temperature 2)
– Valve body                                                ≤ 120 °C
– Ambient                                                     ≤  50 °C
Material
– Valve body                                                 EN AW-6082 (3.2315)
– Plate                                                           EN AW-6082 (3.2315), partly PTFE coated,
EN AC-42100 (3.2371.62)
– Lever                                                         EN AW-6082 (3.2315),
AISI 304 (1.4301), hard-chrome plated
– Actuator shaft                                           AISI 304 (1.4301)
Seal: bonnet, plate, feedthrough                  FKM (Viton®)
Feedthrough                                                 rotary feedthrough
Mounting position                                          any
   


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