产品中心
 
  联系我们
地 址:西安市电子西街3号
电话:+86 29 8899 4490
手机:+86 130 0840 1551
E-mail:jh@jiuhua-tech.com
S650控制摆阀

主要应用:适用于SEMI和FPD工艺的排气端压力控制及隔离,适用于腐蚀性刻蚀及清洗工艺。

节流控制阀

带步进电机
带集成压力控制器
DN Ordering numbers
mm inch aluminum aluminum, hard anodized
 ISO-F JIS  ISO-F JIS
100 4  65040-PA  x   y  65040-JA  x   y  65040-PH  x   y  65040-JH  x   y
160 6  65044-PA  x   y  65044-JA  x   y  65044-PH  x   y  65044-JH  x   y
200 8  65046-PA  x   y  65046-JA  x   y  65046-PH  x   y  65046-JH  x   y
250 10  65048-PA  x   y  65048-JA  x   y  65048-PH  x   y  65048-JH  x   y
320 12  65050-PA  x   y  65050-JA  x   y  65050-PH  x   y  65050-JH  x   y
350 14  65051-JA  x   y  65051-JH  x   y
400 16  65052-PA  x   y  65052-JA  x   y  65052-PH  x   y  65052-JH  x   y
X Y Number of
Controller configurations: Interface: sensors:
G  =  basic version J  = RS485 1
A   =  with SPS H   =  with PFO K  = RS485 2
C   =  with SPS and PFO Y  = Ethernet 1
T   =  basic version with VC master Z  = Ethernet 2
V   =  with SPS and VC master L  = CC-Link 1
U   =  with PFO and VC master N = CC-Link 2
W  =  with SPS, PFO and VC master I   = EtherCAT 1
SPS  =  Sensor Power Supply
(±15 V DC power supply for sensor)
PFO  =  Power Failure Option
(valve closes / opens automatically at power failure)
VC     =  Valve Cluster
(for operating several valves synchronously)
X  = EtherCAT 2
S  = VC slave (without interface)  
G = RS232  
H = RS232  
C = Logic  
E  = Logic  
P  = DeviceNet®  
Q = DeviceNet®  
D  =  Profibus   
F  =  Profibus   
   

技术参数

Leak rate 1): valve body
– Aluminum                                               1 · 10-9 mbar Is-1
– Aluminum, hard anodized                      1 · 10-5 mbar Is-1
Leak rate 1): valve seat
– Aluminum                                               1 · 10-9 mbar Is-1
– Aluminum, hard anodized                      1 · 10-4 mbar Is-1
Pressure range 1)
– Aluminum                                               1 · 10-8 mbar to 1.2 bar (abs)
– Aluminum, hard anodized                      1 · 10-6 mbar to 1.2 bar (abs)
Cycles until first service 2)
– Pressure control                                    1 million
– Closing / opening                                    200 000
Temperature 2)
– Valve body                                             ≤ 120 °C
– Ambient                                                  ≤  50 °C
Material
– Valve body, plate                                   EN AW-6082 (3.2315)
– Sealing ring                                            EN AW-6082 (3.2315), AISI 305 (1.4303),
AISI 420C (1.3541), AISI 631 (1.4568)
– Other parts                                            AISI 316L (1.4404, 1.4435),AISI 440 (1.4122),
AISI 301 (1.4310), AISI 316 Ti (1.4571), AISI 304 (1.4301)
Seal: bonnet, plate, body, feedthrough        FKM (Viton®)
Feedthrough
– Actuator                                                 rotary feedthrough
– Sealing ring                                            shaft feedthrough
Mounting position
– DN 100 – 250                                          any 3)
– DN 320 – 400                                          horizontal only 3)




  • 西安九华电子科技有限公司|地 址:西安市雁塔区电子西街3号西京三号5幢7楼|电话:+86 29 8931 9120|手机:+86 130 0840 1551 / 186 2928 5709
    © 2013-2021 西安九华电子科技有限公司 版权所有 | 服务信箱:jh@jiuhua-tech.com | 陕ICP备19011018号